In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection (Q59754336)
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scientific article published on 30 March 2010
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection |
scientific article published on 30 March 2010 |
Statements
In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection (English)
E Mile
I Bargatin
S Labarthe
C Marcoux
P Andreucci
C Kharrat
E Colinet