Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors (Q61825285)
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scientific article published on 01 January 2012
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors |
scientific article published on 01 January 2012 |
Statements
Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors (English)
G Tosolini