A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction (Q61825374)

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scientific article published on 18 April 2006

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English	A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction	scientific article published on 18 April 2006

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scholarly article

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:16675119%20AND%20SRC:MED&resulttype=core&format=json

20 January 2020

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: electromechanical model and parameter extraction (English)

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Europe PubMed Central

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:16675119%20AND%20SRC:MED&resulttype=core&format=json

20 January 2020

2

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20 January 2020

Francesc Torres

3

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20 January 2020

Francesc Pérez-Murano

5

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20 January 2020

6

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20 January 2020

author name string

Teva J

1

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20 January 2020

Verd J

4

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20 January 2020

publication date

18 April 2006

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20 January 2020

Ultramicroscopy

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20 January 2020

106

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20 January 2020

8-9

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20 January 2020

800-807

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20 January 2020

Ultrasensitive nanoelectromechanical mass detection

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

On the electromechanical modelling of a resonating nano-cantilever-based transducer

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Fabrication and characterization of nanoresonating devices for mass detection

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.12.016

7 January 2021

Identifiers

10.1016/J.ULTRAMIC.2005.12.016

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Europe PubMed Central

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:16675119%20AND%20SRC:MED&resulttype=core&format=json

20 January 2020

PubMed publication ID

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Europe PubMed Central

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:16675119%20AND%20SRC:MED&resulttype=core&format=json

20 January 2020

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