Doping of B atoms into Si nanocrystals prepared by rf cosputtering (Q62495716)

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Doping of B atoms into Si nanocrystals prepared by rf cosputtering
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    Doping of B atoms into Si nanocrystals prepared by rf cosputtering (English)
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    Y. Kanzawa
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    M. Fujii
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    S. Hayashi
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    K. Yamamoto
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    October 1996
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    100
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    4
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    227-230
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