Three-dimensional imaging of individual hafnium atoms inside a semiconductor device (Q62617360)

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scholarly article by Klaus van Benthem et al published 18 July 2005 in Applied Physics Letters
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Three-dimensional imaging of individual hafnium atoms inside a semiconductor device
scholarly article by Klaus van Benthem et al published 18 July 2005 in Applied Physics Letters

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    Three-dimensional imaging of individual hafnium atoms inside a semiconductor device (English)
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    Andrew R. Lupini
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    Hion Suck Baik
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    SeokJoo Doh
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    Jong-Ho Lee
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    Mark P. Oxley
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    Leslie J. Allen
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    Julia T. Luck
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    Stephen J. Pennycook
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    18 July 2005
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    87
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    3
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    034104
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