Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners (Q63408097)
Jump to navigation
Jump to search
No description defined
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners |
No description defined |
Statements
Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners (English)
0 references
September 2003
0 references
94
0 references
5
0 references
2837-2844
0 references
1 reference