Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners (Q63408097)
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English | Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners |
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Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners (English)
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September 2003
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94
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5
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2837-2844
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1 reference