Imprint lithography for integrated circuit fabrication (Q63443906)

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Imprint lithography for integrated circuit fabrication
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    Imprint lithography for integrated circuit fabrication (English)
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    D. J. Resnick
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    W. J. Dauksher
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    D. Mancini
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    K. J. Nordquist
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    T. C. Bailey
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    S. Johnson
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    N. Stacey
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    J. G. Ekerdt
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    C. G. Willson
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    S. V. Sreenivasan
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    N. Schumaker
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    2003
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    21
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    6
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    2624
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