Passive and active oxidation of Si(100) by atomic oxygen: a theoretical study of possible reaction mechanisms (Q74470089)
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scientific article published on 01 July 2002
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Passive and active oxidation of Si(100) by atomic oxygen: a theoretical study of possible reaction mechanisms |
scientific article published on 01 July 2002 |
Statements
Passive and active oxidation of Si(100) by atomic oxygen: a theoretical study of possible reaction mechanisms (English)
Cheol Ho Choi
Da-Jiang Liu
J W Evans