In situ EC-STM studies of MPS, SPS, and chloride on Cu100: structural studies of accelerators for dual damascene electrodeposition (Q79384913)
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scientific article published on 01 December 2006
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | In situ EC-STM studies of MPS, SPS, and chloride on Cu100: structural studies of accelerators for dual damascene electrodeposition |
scientific article published on 01 December 2006 |
Statements
In situ EC-STM studies of MPS, SPS, and chloride on Cu100: structural studies of accelerators for dual damascene electrodeposition (English)
Sang-Eun Bae
Andrew A Gewirth
1 December 2006