Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction (Q80147377)
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scientific article published on 01 December 2001
Language | Label | Description | Also known as |
---|---|---|---|
English | Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction |
scientific article published on 01 December 2001 |
Statements
Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction (English)
K K Lee
D R Lim
L C Kimerling
J Shin
1 December 2001