Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating (Q84522771)
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scientific article published on 05 July 2010
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating |
scientific article published on 05 July 2010 |
Statements
Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating (English)
Vitaliy A Guzenko
Joan Vila-Comamala