Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon (Q84713250)
Jump to navigation
Jump to search
scientific article published on 08 August 2011
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon |
scientific article published on 08 August 2011 |
Statements
Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon (English)
Aleksandr Kravchenko
Andriy Shevchenko
Victor Ovchinnikov