Dopant distributions in n-MOSFET structure observed by atom probe tomography (Q84582425)
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scientific article published on 27 August 2009
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dopant distributions in n-MOSFET structure observed by atom probe tomography |
scientific article published on 27 August 2009 |
Statements
Dopant distributions in n-MOSFET structure observed by atom probe tomography (English)
K Inoue
F Yano
A Nishida
H Takamizawa
T Tsunomura
Y Nagai
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