Metal‐Assisted Chemical Etching of Silicon: A Review (Q37791080)
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scientific article published on January 11, 2011
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Metal‐Assisted Chemical Etching of Silicon: A Review |
scientific article published on January 11, 2011 |
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Metal-assisted chemical etching of silicon: a review (English)
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Metal‐Assisted Chemical Etching of Silicon: A Review (English)
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Zhipeng Huang
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Nadine Geyer
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Peter Werner
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Johannes de Boor
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Ulrich Gösele
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1 January 2011
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285-308
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